Process Advisor Alternatives Search Links
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Solvent Alternatives Guide
Xenon Flash Lamp

References

  • Vig, John R. "UV/Ozone Cleaning of Semiconductor Surfaces". U.S. Army Electronics Technology and Devices Laboratory, Ft. Monmouth, NJ. Unclassified.

  • Gallagher, P., and V. Krukonis. "Precision Parts Cleaning With Supercritical CO2". Presented at the International CFC and Halon Alternatives Conference. December 1991

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Last Update: 31 August 1999
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