CO2 Pellets References Peebles, N., H. Creager, and D. Peebles. "Surface Cleaning by Laser Ablation". Presented at the Solvent Substitution Conference, Phoenix, AZ. December 1990 Allen, S., S. Lee, and K. Imen. "Laser Cleaning Techniques for Critical Surfaces". Optics and Photonics News, vol. 3(6). June 1992 Tam, A. C., W. Zapka and W. Zeimlich. "Efficient Laser Cleaning of Small Particles Using Pulsed Laser Irradiation Synchronized with Liquid-Film Deposition". In: SPIE, vol. 1598, Lasers in Microelectronic Manufacturing. Grimsley, Thomas. "Megasonic Cleaning of Silicon Wafers - A Summary of Factors Influencing Megasonic Cleaning". May 1990 Mateo, N. B. "Using Gas Plasma to Reengineer Surfaces". State Information | Glossary | Conversion Checklist | Comments Home | Process Advisor | Alternatives | Links | Search All SAGE material, Copyright© 1992, Research Triangle Institute Last Update: 31 August 1999 sage@rti.org http://clean.rti.org/alt_ref.cfm?id=pe&cat=ref