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CO2 Pellets


  • Peebles, N., H. Creager, and D. Peebles. "Surface Cleaning by Laser Ablation". Presented at the Solvent Substitution Conference, Phoenix, AZ. December 1990

  • Allen, S., S. Lee, and K. Imen. "Laser Cleaning Techniques for Critical Surfaces". Optics and Photonics News, vol. 3(6). June 1992

  • Tam, A. C., W. Zapka and W. Zeimlich. "Efficient Laser Cleaning of Small Particles Using Pulsed Laser Irradiation Synchronized with Liquid-Film Deposition". In: SPIE, vol. 1598, Lasers in Microelectronic Manufacturing.

  • Grimsley, Thomas. "Megasonic Cleaning of Silicon Wafers - A Summary of Factors Influencing Megasonic Cleaning". May 1990

  • Mateo, N. B. "Using Gas Plasma to Reengineer Surfaces".

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Last Update: 31 August 1999