Copper Metalization for SEMATECH


SEMATECH, a consortium of U.S. semiconductor manufacturers, contacted Oak Ridge for assistance with copper metalization for semiconductor components. SEMATECH is helping usher in a new era of semiconductor performance by making the transition to copper interconnects in microprocessors. The combination of copper and a lower dielectric constant of the surrounding medium reduces signal delay and crosstalk in microprocessors.

Oak Ridge is assisting SEMATECH in making this project a reality by providing expertise in copper metalization. Through the SEMATECH assignee program, an Oak Ridge employee has served as the copper project manager. This individual has been involved in procuring a vital process tool for SEMATECH and in specifying requirements for tool performance, source inspection, qualification, and process optimization.

In the ongoing copper metalization project, Oak Ridge is providing assistance in:

  copper metalization,
  microanalysis of copper deposits,
  analysis of copper-bearing wastes, and
  the development of treatment methodology for removal of metals and rinse-water recovery.

This teaming between Oak Ridge and SEMATECH has opened the door for other projects in which Oak Ridge's technological expertise can be applied.

 
 
 
In recognition of the Y-12 National Security Complex's diverse, integrated capabilities and its commitment  
to succeeding with high-risk projects, the U.S. Congress in 1997 designated Y-12   
as the National Prototype Center.  

For information, phone 1-800-356-4USA or visit our web site: http://orcmt.oakridge.org/npc.html